1100C Quartz Tube Furnace With Solid Precursor Sublimator For CVD 2D Layers Of TMDs

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Program Thermal Tech (Luoyang) Co., Ltd

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1100C Quartz Tube Furnace With Solid Precursor Sublimator For CVD 2D Layers Of TMDs

Name: 1100C Quartz Tube Furnace With Solid Precursor Sublimator For CVD 2D Layers Of TMDs
Brand: Programtherm
Price: 1 USD

Brand Name : Programtherm

Model Number : PTC D110/400/12NG

Certification : CE

Payment Terms : T/T, L/C

Delivery Time : 7 working days

Usage : Oxidation, Diffusion, Thermal Anealing

Tmax temperature : 1200 degree C

Working temperature : 1100 degree C

Heating length : 400mm

Tube diameter : OD110mm ID100mm

Tube material : Quartz

Chamber material : 1500# Alumina fiber board

Heating elements : HRE embedded type

Temp Controller : Digital auto-tune PID 32 segments

Thermocouple : N

Warranty : Two years

After-sales service : free spareparts including air freight

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Product Overview for Oxidation Diffustion Thermal Anealing Tube Furnace

PTC D110/440/12NG is a compact 1100°C CVD tube furnace with a precursor sublimating attachment. Totally four-channel gas inlets are built on the sublimation which allows feedings of various gases to carry the source vapor into the main heater for further decomposition and deposition. The sample holder fixture mounted on the right flange is slidable for easy sample loading/unloading.

Main Features

Compact CVD furnace system with:
4.33" O.D x 4.05" I.D x 29.13" Length quartz tube ( OD 110 xID 103 x L 740, mm )
1100ºC Max. working temperature with +/- 1oC accuracy
The water cooling flange on the right side is slidable for easy sample loading
The water cooling flange on the left side between the heater and furnace is used for pre-heated gas input and sealing
Four-channel gas inlet ( 1/8" Dia tube and tube fitting) are built-in on the left side flange
One small heater is attached to the left side flange of the furnace to preheat input gas, liquid, or evaporate solid chemical, which will be then delivered to the CVD furnace:
Please click the picture left for more details:
1.2''O.D x 6''L SS tube as the heating chamber
Vacuum sealed 1" ID small quartz tube inside the heater ( Pic 2)
400ºC Max. working temperature ( 1000ºC heater is available upon request )
The flange on the left side is for gas sealing and input

1100C Quartz Tube Furnace With Solid Precursor Sublimator For CVD 2D Layers Of TMDs

Ramping, Dwelling, Cooling Curves for 1200 Series Laboratory Furnaces

Safety Measures

Built-in ammeter and dual voltmeters for easy monitoring and troubleshooting.
Overheat protection shuts down the tube furnace if temperature is outside of acceptable range (refer to controller's manual) or when the thermocouple is broken or malfunctions
Power failure protection resumes furnace operation right after the point of failure when power is reestablished
Microprocessor based self-tuning PID control provides optimum thermal process with minimal overshoot

Product Gallery

1100C Quartz Tube Furnace With Solid Precursor Sublimator For CVD 2D Layers Of TMDs

Precursor sublimator device for CVD tube furnace

Technical Specifications

Model No.	PTC D110/440/12NG
Heating zone	Heating length 440mm Uniform temp zone: 180mm
Power supply	4KW AC208-240V, 50/60Hz, single phase
Working temperature	Tmax 1200°C (2192°F) Continuously 1100°C (2012°F) Temperature uniformity +/- 5C
Temperature controller	30 programmable segments for heating, cooling and dwelling. Built-in PID Auto-Tune function with overheating & broken thermocouple protection. Over-temperature protection and alarm allow for operation without attendant(s). +/- 1 ºC temperature accuracy.
Heating rate	≤25°C /min
Thermocouple	N type
Chamber lining	Mitsubishi Raw Material high alumina 1500# fiber board
Furnace tube	Fused quartz OD60mm, length 800mm equips vacuum flanges with gas inlet and outlet valve Vacuum level: Max 10E -5 torr with molecular pump
Vacuum flanges	Pair of hinged type stainless steel flanges with needle valves Water cold hinged type flange is available upon request at extra cost
Vaccum level	10^-2 torr by the mechanical pump 10^-5 Torr by a molecular pump
Atmosphere gas	Argon, Nitrogen etc
Heating element	HRE resistance coil wire
Shipping info	Weight: 78kgs W910xL560xH710mm
Compliance	CE, ISO
Warranty	2 years limited warranty with lifetime technical support

Application Notes

Don't fill any explosive gasses such as Hydrogen or Methane into the furnace tube without necessary safety controls and supervision
Laboratory tube furnaces with quartz tube are designed for use under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MPa
Small cracks may appear on the surface of the refractory ceramics over extended use. This is a normal occurrence and the cracks may be repaired with alumina coating

Size Comparison

Item name	PT D40/400/12	PT D80/400/12	PT D100/400/12
Heating length	400 mm	400 mm	400 mm
Tube size	OD40xL800mm	OD80xL800mm	OD100xL800mm
Power	220V/1.8KW	220V/2.8KW	220V/3KW
Furnace dimensions (LxWxH)	830x450x520mm	850x470x540mm	870x490x560mm
Weight	58 KGS	75 KGS	80 KGS

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